Biyapay

    Reticle Cabinet
    Reticle Cabinet functions as photomask pod storage equipment with an purging function. It is designed to store photomask pods for IC production in batches and ensures the quality of photomasks by filling them with pure gas.
    For the first time in China, MeetFuture's Reticle Cabinet has achieved the ability to reduce the humidity of the photomask pod to below RH10% in a very short time, even with a very small flow rate.
    Feature Highlights:

    User-friendly man-machine interface

    Stable system integration

    Drawer design for mass storage

    High-speed continuous purge

    Compatibility with multiple EAP communications

    Software Description
    Reticle Cabinet Storage Cabinet Software System
    Reticle Cabinet Software
    The software provides real-time feedback on materials information, purge time, and purging stage for the current materials . It also monitors the flow and generates alarms accordingly.

    Feature Highlights:
    ▪ Supports touchscreen control
    ▪ Allows dynamic configuration of customer parameters
    ▪ Supports docking with EAP and MF FabScope systems
    Important Parameters
    Technical IndicatorsParameters

    Dimensions (L*W*H)

    2217mm*1058mm*1913mm

    Weight (full/empty）

    630kg&460kg

    Self （Number of positions）

    		84

    Storing POD Types

    SMIF POD RSP3 RSP1

    RFID read rate

    ≥99.999%

    power supply

    220V，50Hz，2A


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